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Effect of antenna size on electron kinetics in inductively coupled plasmas

Title
Effect of antenna size on electron kinetics in inductively coupled plasmas
Author
이효창
Keywords
Antennas; Electron energy distribution functions; Inductively coupled plasma; Plasma pressure; Coils; ENERGY DISTRIBUTION FUNCTION; PRESSURE RF DISCHARGE; POWER DEPOSITION; POSITIVE-COLUMN; GAS-DISCHARGES; GLOW-DISCHARGE; TRANSITION; DENSITY; DISTRIBUTIONS; TEMPERATURE
Issue Date
2013-10
Publisher
AMER INST PHYSICS, 1305 WALT WHITMAN RD, STE 300, MELVILLE, NY 11747-4501 USA
Citation
PHYSICS OF PLASMAS, 2013, 20(10), P.101607-
Abstract
Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented. (C) 2013 AIP Publishing LLC.
URI
http://aip.scitation.org/doi/abs/10.1063/1.4823470http://hdl.handle.net/20.500.11754/44556
ISSN
1070-664X; 1089-7674
DOI
10.1063/1.4823470
Appears in Collections:
RESEARCH INSTITUTE[S](부설연구소) > ETC
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