Chromatic confocal microscopy with a novel wavelength detection method using transmittance
- Title
- Chromatic confocal microscopy with a novel wavelength detection method using transmittance
- Author
- 유홍기
- Keywords
- LIGHT; SUPERCONTINUUM; RESOLUTION; PROFILER; LENSES
- Issue Date
- 2013-03
- Publisher
- OPTICAL SOC AMER, 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA
- Citation
- OPTICS EXPRESS, 권: 21 호: 5, 페이지: 6286-6294
- Abstract
- Chromatic confocal microscopy (CCM) is a promising technology that enables high-speed three-dimensional surface profiling without mechanical depth scanning. However, the spectrometer, which measures depth information encoded by axial color, limits the speed of three-dimensional imaging. We present a novel method for chromatic confocal microscopy with transmittance detection. Depth information can be instantaneously obtained by the ratio of intensity signals from two photomultiplier tubes by detecting a peak wavelength using transmittance of a color filter. This non-destructive and high-speed surface profiling method might be useful in many fields, including the semiconductor and flat panel display industries, and in material science. (c) 2013 Optical Society of America
- URI
- https://www.osapublishing.org/oe/abstract.cfm?uri=oe-21-5-6286http://hdl.handle.net/20.500.11754/44185
- ISSN
- 1094-4087
- DOI
- 10.1364/OE.21.006286
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML