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dc.contributor.author소홍윤-
dc.date.accessioned2018-03-05T04:11:40Z-
dc.date.available2018-03-05T04:11:40Z-
dc.date.issued2013-10-
dc.identifier.citationMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2013,21(1), p195-202en_US
dc.identifier.issn0946-7076-
dc.identifier.urihttps://link.springer.com/article/10.1007%2Fs00542-013-1953-2-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/42244-
dc.description.abstractThis paper reports on a novel thermal actuator with sub-micron metallic structures and a buckling arm to operate with low voltages and to generate very large deflections, respectively. A lumped electrothermal model and analysis were also developed to validate the mechanical design and easily predict the temperature distribution along arms of the sub-micron actuator. The actuator was fabricated via the combination of electron beam lithography to form actuator arms with a minimum feature size of 200 nm and lift-off process to deposit a high aspect ratio nickel structure. Reproducible displacements of up to 1.9 mu m at the tip were observed up to 250 mV under confocal microscope. The experimentally measured deflection values and theoretically calculated temperature distribution by the developed model were compared with finite element analysis results and they were in good agreement. This study shows a promising approach to develop more sophisticated nano actuators required larger deflections for manipulation of sub-micron scale objects with low-power consumption.en_US
dc.description.sponsorshipDepartment of Mechanical Engineering, Berkeley Sensor & Actuator Center, University of California, Berkeley,CA 94720, USAen_US
dc.language.isoenen_US
dc.publisherSPRINGER, 233 SPRING ST, NEW YORK, NY 10013 USAen_US
dc.subjectMICRO-ACTUATORSen_US
dc.subjectMICROACTUATORSen_US
dc.subjectSILICONen_US
dc.subjectDESIGNen_US
dc.titleElectrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling armen_US
dc.typeArticleen_US
dc.identifier.doi10.1007/s00542-013-1953-2-
dc.relation.journalMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS-
dc.contributor.googleauthorSo, Hong-Yun-
dc.contributor.googleauthorPisano, Albert P.-
dc.relation.code2013011306-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MECHANICAL ENGINEERING-
dc.identifier.pidhyso-
dc.identifier.researcherID55901410900-
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COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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