190 0

Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm

Title
Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm
Author
소홍윤
Keywords
MICRO-ACTUATORS; MICROACTUATORS; SILICON; DESIGN
Issue Date
2013-10
Publisher
SPRINGER, 233 SPRING ST, NEW YORK, NY 10013 USA
Citation
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2013,21(1), p195-202
Abstract
This paper reports on a novel thermal actuator with sub-micron metallic structures and a buckling arm to operate with low voltages and to generate very large deflections, respectively. A lumped electrothermal model and analysis were also developed to validate the mechanical design and easily predict the temperature distribution along arms of the sub-micron actuator. The actuator was fabricated via the combination of electron beam lithography to form actuator arms with a minimum feature size of 200 nm and lift-off process to deposit a high aspect ratio nickel structure. Reproducible displacements of up to 1.9 mu m at the tip were observed up to 250 mV under confocal microscope. The experimentally measured deflection values and theoretically calculated temperature distribution by the developed model were compared with finite element analysis results and they were in good agreement. This study shows a promising approach to develop more sophisticated nano actuators required larger deflections for manipulation of sub-micron scale objects with low-power consumption.
URI
https://link.springer.com/article/10.1007%2Fs00542-013-1953-2http://hdl.handle.net/20.500.11754/42244
ISSN
0946-7076
DOI
10.1007/s00542-013-1953-2
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE