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Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers

Title
Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers
Author
배석주
Keywords
spatial defects; neural network; pattern recognition; similarity; wafer map; yield management
Issue Date
2012-06
Publisher
TAYLOR & FRANCIS LTD, 4 PARK SQUARE, MILTON PARK, ABINGDON OX14 4RN, OXON, ENGLAND
Citation
International journal of production research, Vol.50, No.12 [2012], 3274-3287
Abstract
The integrated circuits (ICs) on wafers are highly vulnerable to defects generated during the semiconductor manufacturing process. The spatial patterns of locally clustered defects are likely to contain information related to the defect generating mechanism. For the purpose of yield management, we propose a multi-step adaptive resonance theory (ART1) algorithm in order to accurately recognise the defect patterns scattered over a wafer. The proposed algorithm consists of a new similarity measure, based on the p-norm ratio and run-length encoding technique and pre-processing procedure: the variable resolution array and zooming strategy. The performance of the algorithm is evaluated based on the statistical models for four types of simulated defect patterns, each of which typically occurs during fabrication of ICs: random patterns by a spatial homogeneous Poisson process, ellipsoid patterns by a multivariate normal, curvilinear patterns by a principal curve, and ring patterns by a spherical shell. Computational testing results show that the proposed algorithm provides high accuracy and robustness in detecting IC defects, regardless of the types of defect patterns residing on the wafer.
URI
http://eds.b.ebscohost.com/eds/detail/detail?vid=0&sid=42172bab-a479-43a6-b5e9-af74c8a7129c%40sessionmgr104&bdata=Jmxhbmc9a28mc2l0ZT1lZHMtbGl2ZQ%3d%3d#AN=77058500&db=bthhttp://hdl.handle.net/20.500.11754/37939
ISSN
0020-7543
DOI
10.1080/00207543.2011.574502
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > INDUSTRIAL ENGINEERING(산업공학과) > Articles
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