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dc.contributor.author박관규-
dc.date.accessioned2018-02-13T08:25:15Z-
dc.date.available2018-02-13T08:25:15Z-
dc.date.issued2011-11-
dc.identifier.citationAnalytical Chemistry, 15 December 2011, 83(24), P9314-9320en_US
dc.identifier.issn0003-2700-
dc.identifier.issn1520-6882-
dc.identifier.urihttp://pubs.acs.org/doi/abs/10.1021/ac201626b-
dc.description.abstractDistributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/mu m(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3 sigma) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/mu m(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 +/- 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol.en_US
dc.description.sponsorshipWe thank Defense Advanced Research Projects Agency, Microsystems Technology Office, for their financial support of this project through grant N66001-06-1-2030. We also thank Joe Simonson at Sandia National Laboratory for drop-coating the polymer on our device and Mike Switkes at the MIT Lincoln Laboratory for the advanced chemical setup.en_US
dc.language.isoenen_US
dc.publisherAmer Chemical SOCen_US
dc.titleChemical Vapor Detection Using a Capacitive Micromachined Ultrasonic Transduceren_US
dc.typeArticleen_US
dc.relation.no24-
dc.relation.volume83-
dc.identifier.doi10.1021/ac201626b-
dc.relation.page9314-9320-
dc.relation.journalANALYTICAL CHEMISTRY-
dc.contributor.googleauthorLee, Hyunjoo-
dc.contributor.googleauthorPark, Kwan Kyu-
dc.contributor.googleauthorMario Kupnik-
dc.contributor.googleauthorO Oralkan-
dc.contributor.googleauthorButrus Khuri-Yakub-
dc.relation.code2011200599-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MECHANICAL ENGINEERING-
dc.identifier.pidkwankyu-
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COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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