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dc.contributor.author이선영-
dc.date.accessioned2018-02-13T01:10:27Z-
dc.date.available2018-02-13T01:10:27Z-
dc.date.issued2015-05-
dc.identifier.citationINTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v. 16, NO 5, Page. 1029-1034en_US
dc.identifier.issn2234-7593-
dc.identifier.issn2005-4602-
dc.identifier.urihttps://link.springer.com/article/10.1007/s12541-015-0133-y-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/36929-
dc.description.abstractBarium Titanate (BaTiO3, BT) layers were deposited using Nano Particle Deposition System (NPDS). NPDS is a type of Aerosol Deposition Method (ADM), dry deposition approach that simplifies the process of depositing a BaTiO3 layer because it eliminates the need for solvents or binder. In this study, a BaTiO3 dielectric layer was deposited using NPDS, and its dielectric properties and microstructure were characterized. Polarization-electric field (P-E) hysteresis analysis was used to characterize the resulting metalinsulator-metal (MIM) capacitor structure, and the capacitance value and leakage current were measured. The BaTiO3 dielectric layer had a thickness of 5 mu m and a high dielectric constant of 1300 without heat treatment, while maintaining high crystallinity after deposition. A high capacitance value of 228 nF/cm(2) was obtained. This work demonstrated the use of ADM for fabricating a capacitor structure.en_US
dc.description.sponsorshipThis research was supported by Nano . Material Technology. Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and Future Planning (MSIP) (2009-0082580). This work was also supported by the National Research Foundation of Korea (NRF) grant, funded by the Korean government (MSIP) (2012-0008727 and 2012R1A1A3004290).en_US
dc.language.isoen_USen_US
dc.publisherKOREAN SOC PRECISION ENGen_US
dc.subjectAerosol deposition method (ADM)en_US
dc.subjectBarium titanateen_US
dc.subjectCapacitoren_US
dc.subjectFerroelectric filmen_US
dc.subjectNano particle deposition system (NPDS)en_US
dc.subjectBATIO3 THIN-FILMSen_US
dc.subjectCHEMICAL-VAPOR-DEPOSITIONen_US
dc.subjectAEROSOL DEPOSITIONen_US
dc.subjectROOM-TEMPERATUREen_US
dc.subjectGLASS-CERAMICSen_US
dc.subjectLOW VACUUMen_US
dc.subjectCONSTRUCTIONen_US
dc.subjectFABRICATIONen_US
dc.subjectPOWDERSen_US
dc.subjectGROWTHen_US
dc.titleDielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS)en_US
dc.typeArticleen_US
dc.relation.no5-
dc.relation.volume16-
dc.identifier.doi10.1007/s12541-015-0133-y-
dc.relation.page1029-1034-
dc.relation.journalINTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-
dc.contributor.googleauthorYang, SK-
dc.contributor.googleauthorKim, HS-
dc.contributor.googleauthorPawar, RC-
dc.contributor.googleauthorAhn, S.H-
dc.contributor.googleauthorLee, CS-
dc.relation.code2015005980-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF ENGINEERING SCIENCES[E]-
dc.sector.departmentDEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING-
dc.identifier.pidsunyonglee-
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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