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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-8 of 8 (Search time: 0.003 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-02
Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns
안일신
2008-09
Investigation of Laminated High-k Oxides by Using Vacuum Ultraviolet Spectroscopic Ellipsometry
안일신
2008-02
Ellipsometric inspection of the inner surface of pellicle-covered masks
안일신
2007-03
Ellipsometric studies of the absorption of liquid by photo resist
안일신
2018-04
Characterization of Free-Standing Nano-Membranes by Using Ellipsometry
안일신
2015-05
Application of imaging ellipsometry to the detection of latent fingermarks
안일신
2003-12
Mueller matrix ellipsometry 제작 및 응용
안일신
2003-02
Use of Rotating Compensator Spectroscopic Ellipsometry for Monitoring the Photoresist Etching on Si Wafer
안일신
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8
안일신
-Subject
2
Lithography
2
Pellicle
1
#Mueller Matri
1
Anisotropic
1
Anisotropy
1
Contact hole
1
DBD
1
Dual Rotating Compensator Ellipso...
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Effective medium theory
1
Etching
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-Date issued
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2010 - 2018
6
2003 - 2009
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