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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 38 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2008-09
Optimum Biasing for 45nm Node Chromeless and Attenuated Phase Shift Mask
안일신
2008-09
Investigation of Laminated High-k Oxides by Using Vacuum Ultraviolet Spectroscopic Ellipsometry
안일신
2008-02
Optimum Dose Variation Caused By Post Exposure Bake Temperature Difference Inside Photoresist Over Different Sublayers And Thickness
안일신
2008-02
32 nm 1:1 line and space patterning by resist reflow process
안일신
2008-02
Resist reflow process for arbitrary 32 nm node pattern
안일신
2008-02
Ellipsometric inspection of the inner surface of pellicle-covered masks
안일신
2008-10
Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films
안일신
2008-11
A Mask Generation Approach to Double Patterning Technology with Inverse Lithography
안일신
2008-11
Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process
안일신
2008-10
Robust Ohmic contact junctions between metallic tips and multiwalled carbon nanotubes for scanned probe microscopy
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ellipsometry
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lithography
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32 nm line and space half-pitch
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45nm line and space
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attenuated phase shift mask (att....
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bias
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chromeless phase lithography (CPL...
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circuit modeling
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critical phenomena
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current crowding
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