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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 77 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2007-08
Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer
안일신
2007-09
Photoresist Adhesion Effect of Resist Reflow Process
안일신
2006-02
The Effect of Transmission Reduction by Reticle Haze Formation
안일신
2006-02
Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns
안일신
2006-05
Ellipsometry를 이용한 193 nm photoresist에서의 물의 흡수 연구
안일신
2005-06
Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition
안일신
2005-06
Bulk Effects of Thermal Flow Resists
안일신
2005-06
Calibration-Free Multichannel Ellipsometry for Retardance Measurement
안일신
2006-09
Morphology and ellipsometry study of pentacene films grown on native SiO2 and glass substrates
안일신
2006-11
Nonlinear Optical Response of 1-D Photonic Crystals Fabricated by Using a SOl-Gel Method
안일신
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ellipsometry
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calibration
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lithography
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Navier-Stokes equation
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32 nm line and space half-pitch
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ALIGNMENT
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bias
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