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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-5 of 5 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2006-11
Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns
안일신
2008-09
Optimum Biasing for 45nm Node Chromeless and Attenuated Phase Shift Mask
안일신
2008-09
Optimum biasing for 45 nm node chromeless and attenuated phase shift mask
신동수
2006-03
Optimization of chromeless phase mask by comparing scattering bars with zebra patterns
신동수
2006-11
Chromeless phase lithography using scattering bars and zebra patterns
신동수
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신동수
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안일신
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transmission
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zebra patterns
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45nm line and space
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attenuated phase shift mask (att....
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bias
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chromeless phase lithography (CPL)
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chromeless phase lithography (CPL...
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scattering bars (SBs)
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chromeless phase shift mask
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