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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 21-30 of 84 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2019-05
Polarization errors associated with reflective objectives in a micro-spot spectroscopic ellipsometer
안일신
2005-07
Lens Aberration Effect on the Line Width for Different Pattern Shapes and Duty Ratios
안일신
2008-09
Optimum Biasing for 45nm Node Chromeless and Attenuated Phase Shift Mask
안일신
2008-09
Investigation of Laminated High-k Oxides by Using Vacuum Ultraviolet Spectroscopic Ellipsometry
안일신
2008-02
Optimum Dose Variation Caused By Post Exposure Bake Temperature Difference Inside Photoresist Over Different Sublayers And Thickness
안일신
2008-02
32 nm 1:1 line and space patterning by resist reflow process
안일신
2008-02
Resist reflow process for arbitrary 32 nm node pattern
안일신
2008-02
Ellipsometric inspection of the inner surface of pellicle-covered masks
안일신
2007-03
Ellipsometric studies of the absorption of liquid by photo resist
안일신
2008-10
Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films
안일신
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ellipsometry
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Ellipsometry
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Lithography
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calibration
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lithography
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Navier-Stokes equation
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32 nm line and space half-pitch
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ALIGNMENT
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bias
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BIPLATE COMPENSATOR
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