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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 11-20 of 77 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2006-11
Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography
안일신
2006-11
Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns
안일신
2006-07
Evaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography
안일신
2006-09
Picosecond Nonlinear OPtical Transmission Measurement on Anatase TiO2 THin Films
안일신
2006-08
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
안일신
2005-06
Determination of the Optical Functions of Various Liquids by Rotating Compensator Multichannel Spectroscopic Ellipsometry
안일신
2006-12
Single Anti-Reflection Coating Optimization with Different Polarizations for Hyper Numerical Aperture Immersion Lithography
안일신
2005-10
Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry
안일신
2005-08
Line-Width Variation with Absorber Thickness in Extreme Ultraviolet Lithography
안일신
2005-07
Lens Aberration Effect on the Line Width for Different Pattern Shapes and Duty Ratios
안일신
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ellipsometry
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Ellipsometry
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calibration
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Lithography
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lithography
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Navier-Stokes equation
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32 nm line and space half-pitch
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ALIGNMENT
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bias
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BIPLATE COMPENSATOR
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