망간 함유 박막을 위한 새로운 망간 화합물

Abstract

연구에서는 화학 기상 증착 (Chemical Vapor Deposition, CVD) 및 원자 층 증착 (Atomic Layer Deposition, ALD) 방법으로 망간 함유 박막을 형성하는데 사용되는 새로운 망간 화합물을 합성하고 특성을 분석하였다. 망간 산화물 전구체 [Mn(tmhd)(tmeda)Cl]2 (1) [Mn(tmhd)(dmamp)]2 (2), [Mn(tmhd)(edpa)]2 (3) 및 망간 질화물 전구체 [Mn(epda)(diethylamide)]2 (4), Mn(epda)(amidinate) (5), Mn(epda)2 (6)는 MnCl2 와 sodium 2,2,6,6-tetramethyl-3,5-hetanedionate (Na(tmhd)), N,N,N’-trimethylethylenediamine (tmeda), sodium-1-dimethylamino-2-methyl-2- propoxide (Na(dmamp)), sodium N-ethoxy-2,2-dimethyl-propanamide ((Na(edpa)), lithium (1-(dimethyl amino)-2-methylpropan-2-yl)(ethyl)amide ((Li(epda)), lithium diethylamide (Li(diethylamide)), Li(di-isopropyl(methyl)amidinate) 리간드를 각각 반응하여 합성하였다. 모든 화합물은 적외선 분광법 (FT-IR)과 원소분석법 (EA)으로 분석 하였고, 화합물 1-4는 실온에서 결정을 얻어 X-ray 단결정 구조분석을 통해 구조를 분석하였다. 화합물 1과 3은 왜곡된 팔면체 구조이고 화합물 2는 왜곡된 삼각양뿔 구조, 화합물 4는 왜곡된 사면체 구조임을 확인하였다. 화합물 2-6은 열중량분석법 (TGA)을 통해 열적 특성을 분석하였다. 화합물 2와 3은 19.5%, 14.9%의 잔여물이 남았고, 화합물 4-6은 각각 47.1%, 78.7%, 15.9%의 잔여물이 남았다.; In this study, new manganese oxide precursors ([Mn(tmhd)(tmeda)Cl]2 (1), [Mn(tmhd)(dmamp)]2 (2), [Mn(tmhd)(edpa)]2 (3)) and manganese nitride precursors ([Mn(epda)(diethylamide)]2 (4), Mn(epda)(amidinate) (5), Mn(epda)2 (6)) for manganese-containing thin films by chemical vapor deposition (CVD) and atomic layer deposition (ALD) were synthesized and characterized. All compounds were synthesized by methathesis reaction between MnCl2 and ligands such as sodium 2,2,6,6-tetramethyl-3,5-hetanedionate (Na(tmhd)), N,N,N’-trimethylethylene diamine (tmeda), sodium-1-dimethylamino-2-methyl-2-propoxide (Na(dmamp)), sodium N-ethoxy-2,2-dimethyl-propanamide ((Na(edpa)), lithium (1-(dimethyl amino)-2-methylpropan-2-yl)(ethyl)amide ((Li(epda)), lithium diethylamide (Li(diethylamide)), Li(di-isopropyl(methyl)amidinate). All compounds were analyzed by infrared spectroscopy (FT-IR) and elemental analyses (EA). The molecular structures of 1-4 obtained from X-ray single crystallography. The compounds 1-4 are dimer. The molecular structures of 1 and 3, 2, and 4 represent distorted octahedral geometry, distorted trigonal bipyramidal structure, and distorted tetrahedral structure, respectively. Thermal properties of the compounds 2-6 were analyzed by thermogravimetric analysis (TGA). In TGA, 2 and 3 revealed residues of 19.5% and 14.9%, respectively. The compounds 4, 5, and 6 were 47.1%, 78.7%, and 15.9%, respectively.