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dc.contributor.author김영범-
dc.date.accessioned2017-11-07T05:06:38Z-
dc.date.available2017-11-07T05:06:38Z-
dc.date.issued2016-01-
dc.identifier.citationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v. 34, NO 1, Article number 01A151, Page. 1-7en_US
dc.identifier.issn0734-2101-
dc.identifier.issn1520-8559-
dc.identifier.urihttp://avs.scitation.org/doi/10.1116/1.4938105-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/30532-
dc.description.abstractNanostructured ZrO2 thin films were prepared by thermal atomic layer deposition (ALD) and by plasma-enhanced atomic layer deposition (PEALD). The effects of the deposition conditions of temperature, reactant, plasma power, and duration upon the physical and chemical properties of ZrO2 films were investigated. The ZrO2 films by PEALD were polycrystalline and had low contamination, rough surfaces, and relatively large grains. Increasing the plasma power and duration led to a clear polycrystalline structure with relatively large grains due to the additional energy imparted by the plasma. After characterization, the films were incorporated as electrolytes in thin film solid oxide fuel cells, and the performance was measured at 500 degrees C. Despite similar structure and cathode morphology of the cells studied, the thin film solid oxide fuel cell with the ZrO2 thin film electrolyte by the thermal ALD at 250 degrees C exhibited the highest power density (38 mW/cm(2)) because of the lowest average grain size at cathode/electrolyte interface. (C) 2015 American Vacuum Society.en_US
dc.description.sponsorshipThis work was supported by the Global Frontier R&D Program of the Center for Multiscale Energy System, funded by the National Research Foundation under the Ministry of Education, Science and Technology of Korea (2011-0031569). BK21 Plus is also acknowledged for their partial support.en_US
dc.language.isoenen_US
dc.publisherA V S AMER INST PHYSICSen_US
dc.subjectYTTRIA-STABILIZED ZIRCONIAen_US
dc.subjectCATHODEen_US
dc.subjectFABRICATIONen_US
dc.subjectMEMBRANESen_US
dc.subjectPERFORMANCEen_US
dc.subjectEXCHANGEen_US
dc.subjectSIZEen_US
dc.subjectSOFCen_US
dc.titleProperties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cellsen_US
dc.typeArticleen_US
dc.relation.no1-
dc.relation.volume34-
dc.identifier.doi10.1116/1.4938105-
dc.relation.page1-7-
dc.relation.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-
dc.contributor.googleauthorCho, Gu Young-
dc.contributor.googleauthorNoh, Seungtak-
dc.contributor.googleauthorLee, Yoon Ho-
dc.contributor.googleauthorJi, Sanghoon-
dc.contributor.googleauthorHong, Soon Wook-
dc.contributor.googleauthorKoo, Bongjun-
dc.contributor.googleauthorAn, Jihwan-
dc.contributor.googleauthorKim, Young-Beom-
dc.contributor.googleauthorCha, Suk Won-
dc.relation.code2016001738-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MECHANICAL ENGINEERING-
dc.identifier.pidybkim-
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COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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