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Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells

Title
Properties of nanostructured undoped ZrO2 thin film electrolytes by plasma enhanced atomic layer deposition for thin film solid oxide fuel cells
Author
김영범
Keywords
YTTRIA-STABILIZED ZIRCONIA; CATHODE; FABRICATION; MEMBRANES; PERFORMANCE; EXCHANGE; SIZE; SOFC
Issue Date
2016-01
Publisher
A V S AMER INST PHYSICS
Citation
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v. 34, NO 1, Article number 01A151, Page. 1-7
Abstract
Nanostructured ZrO2 thin films were prepared by thermal atomic layer deposition (ALD) and by plasma-enhanced atomic layer deposition (PEALD). The effects of the deposition conditions of temperature, reactant, plasma power, and duration upon the physical and chemical properties of ZrO2 films were investigated. The ZrO2 films by PEALD were polycrystalline and had low contamination, rough surfaces, and relatively large grains. Increasing the plasma power and duration led to a clear polycrystalline structure with relatively large grains due to the additional energy imparted by the plasma. After characterization, the films were incorporated as electrolytes in thin film solid oxide fuel cells, and the performance was measured at 500 degrees C. Despite similar structure and cathode morphology of the cells studied, the thin film solid oxide fuel cell with the ZrO2 thin film electrolyte by the thermal ALD at 250 degrees C exhibited the highest power density (38 mW/cm(2)) because of the lowest average grain size at cathode/electrolyte interface. (C) 2015 American Vacuum Society.
URI
http://avs.scitation.org/doi/10.1116/1.4938105http://hdl.handle.net/20.500.11754/30532
ISSN
0734-2101; 1520-8559
DOI
10.1116/1.4938105
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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