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The sheath effect on the floating harmonic method

Title
The sheath effect on the floating harmonic method
Author
정진욱
Keywords
PLASMA; BIAS
Issue Date
2015-12
Publisher
AMER INST PHYSICS
Citation
PHYSICS OF PLASMAS, v. 22, NO 12, Article number 123503, Page. 1-5
Abstract
The floating harmonic method biases sinusoidal voltage to a probe sheath, and as its response, harmonic currents can be obtained. These currents can be used to determine the plasma parameters. However, different shapes of probes have different shapes of sheaths that can affect the diagnostic results. However, no research has been done on the sheath effect on the floating harmonic method. Therefore, we investigate the effect of the sheath during floating harmonic diagnostics by comparing cylindrical and planar probes. While the sinusoidal voltages were applied to a probe, because the sheath oscillated, the time variant ion current and their harmonic currents were added to the electron harmonic currents. In the floating harmonic method, the harmonic currents are composed of only the electron harmonic currents. Therefore, the ion harmonic currents affect the diagnostic results. In particular, the electron temperature obtained by the small probe tip was higher than that of the large probe tip. This effect was exacerbated when the ratio of the probe tip radius to the sheath length was smaller. (C) 2015 AIP Publishing LLC.
URI
http://aip.scitation.org/doi/10.1063/1.4936347http://hdl.handle.net/20.500.11754/30035
ISSN
1070-664X; 1089-7674
DOI
10.1063/1.4936347
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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