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dc.contributor.author정진욱-
dc.date.accessioned2017-10-16T04:27:06Z-
dc.date.available2017-10-16T04:27:06Z-
dc.date.issued2015-12-
dc.identifier.citationPHYSICS OF PLASMAS, v. 22, NO 12, Article number 123503, Page. 1-5en_US
dc.identifier.issn1070-664X-
dc.identifier.issn1089-7674-
dc.identifier.urihttp://aip.scitation.org/doi/10.1063/1.4936347-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/30035-
dc.description.abstractThe floating harmonic method biases sinusoidal voltage to a probe sheath, and as its response, harmonic currents can be obtained. These currents can be used to determine the plasma parameters. However, different shapes of probes have different shapes of sheaths that can affect the diagnostic results. However, no research has been done on the sheath effect on the floating harmonic method. Therefore, we investigate the effect of the sheath during floating harmonic diagnostics by comparing cylindrical and planar probes. While the sinusoidal voltages were applied to a probe, because the sheath oscillated, the time variant ion current and their harmonic currents were added to the electron harmonic currents. In the floating harmonic method, the harmonic currents are composed of only the electron harmonic currents. Therefore, the ion harmonic currents affect the diagnostic results. In particular, the electron temperature obtained by the small probe tip was higher than that of the large probe tip. This effect was exacerbated when the ratio of the probe tip radius to the sheath length was smaller. (C) 2015 AIP Publishing LLC.en_US
dc.description.sponsorshipThis research was supported by the Converging Research Center Program (NRF-2014M3C1A8053701), the National R&D Program (NRF-2014M1A7A1A03045185), and the development of the future semiconductor device Program of MOTIE/KSRC (10052861).en_US
dc.language.isoenen_US
dc.publisherAMER INST PHYSICSen_US
dc.subjectPLASMAen_US
dc.subjectBIASen_US
dc.titleThe sheath effect on the floating harmonic methoden_US
dc.typeArticleen_US
dc.relation.no12-
dc.relation.volume22-
dc.identifier.doi10.1063/1.4936347-
dc.relation.page1-5-
dc.relation.journalPHYSICS OF PLASMAS-
dc.contributor.googleauthorLee, Jaewon-
dc.contributor.googleauthorKim, Kyung-Hyun-
dc.contributor.googleauthorChung, Chin-Wook-
dc.relation.code2015001483-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING-
dc.identifier.pidjoykang-
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COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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