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복합광원 기반의 광 소결법을 이용한 구리나노잉크 패턴의 전도성 향상에 관한 연구

Title
복합광원 기반의 광 소결법을 이용한 구리나노잉크 패턴의 전도성 향상에 관한 연구
Other Titles
Effective photonic sintering for highly conductive copper nano-ink film using flash white light combined with Deep UV and NIR light irradiation
Author
김학성
Keywords
Cu nano-ink; Sintering process; Flash white light; Near infrared; Deep ultraviolet; 구리 나노잉크; 소결 공정; 극단파 백색광; 근 적외선; 원 자외선
Issue Date
2015-11
Publisher
대한기계학회
Citation
대한기계학회 창립 70주년 기념 학술대회, 2015.11, Page. 571-575
Abstract
We developed an ultra-high speed photonic sintering method involving flash white light (FWL) combined with near infrared (NIR) and deep UV light irradiation to produce highly conductive copper nano-ink film. Flash white light irradiation energy and the power of NIR/deep UV were optimized to obtain high conductivity Cu films. Several microscopic and spectroscopic characterization techniques such as scanning electron microscopy (SEM) and a x-ray diffraction (XRD) were employed to characterize the Cu nano-films. Optimally sintered Cu nano-ink films produced using a deep UV-assisted flash white light sintering technique had the lowest resistivity (7.62 μΩ·cm), which was only 4.5-fold higher than that of bulk Cu film (1.68 μΩ•cm).
URI
http://www.dbpia.co.kr/Article/NODE06575621http://hdl.handle.net/20.500.11754/28921
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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