Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 최동훈 | - |
dc.date.accessioned | 2017-09-05T05:19:12Z | - |
dc.date.available | 2017-09-05T05:19:12Z | - |
dc.date.issued | 2015-11 | - |
dc.identifier.citation | 대한기계학회 창립 70주년 기념 학술대회, 2015.11, Page. 3488-3491 | en_US |
dc.identifier.uri | http://www.dbpia.co.kr/Article/NODE06576401 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/28902 | - |
dc.description.abstract | One of the most affective factors for thin film uniformity in vacuum deposition system is temperature distribution. In this research, design optimization based on CAE which is related to thermal analysis was performed to minimize temperature distribution in evaporation system. In order to minimize the distribution, various parts of evaporation system were changed within the design range. Heat Analysis was performed using ABAQUS. Based on thermal analysis results which are obtained from various analyses, we conducted an optimal design. It was conducted by commercial optimization software. After generating the approximation model based on the DOE data, an optimal design was performed. As a result, the temperature distribution was improved compared to conventional designs | en_US |
dc.description.sponsorship | 본 연구를 위하여 PIDO 툴인 PIAnO 소프트 웨어를 제공한 ㈜피도텍에 감사 드립니다. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 대한기계학회 | en_US |
dc.subject | Evaporation | en_US |
dc.subject | Optimization | en_US |
dc.subject | Heat Analysis | en_US |
dc.subject | 증착 | en_US |
dc.subject | 최적화 | en_US |
dc.subject | 열해석 | en_US |
dc.title | 열해석 기반 증착 시스템 구조 최적 설계에 관한 연구 | en_US |
dc.title.alternative | Evaporation system design optimization based on heat analysis | en_US |
dc.type | Article | en_US |
dc.relation.no | - | - |
dc.relation.volume | - | - |
dc.relation.page | 1-4 | - |
dc.contributor.googleauthor | 서민규 | - |
dc.contributor.googleauthor | 최동훈 | - |
dc.contributor.googleauthor | Seo, Min Gyu | - |
dc.contributor.googleauthor | Choi, Dong-Hoon | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | dhchoi | - |
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