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dc.contributor.author최동훈-
dc.date.accessioned2017-09-05T05:19:12Z-
dc.date.available2017-09-05T05:19:12Z-
dc.date.issued2015-11-
dc.identifier.citation대한기계학회 창립 70주년 기념 학술대회, 2015.11, Page. 3488-3491en_US
dc.identifier.urihttp://www.dbpia.co.kr/Article/NODE06576401-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/28902-
dc.description.abstractOne of the most affective factors for thin film uniformity in vacuum deposition system is temperature distribution. In this research, design optimization based on CAE which is related to thermal analysis was performed to minimize temperature distribution in evaporation system. In order to minimize the distribution, various parts of evaporation system were changed within the design range. Heat Analysis was performed using ABAQUS. Based on thermal analysis results which are obtained from various analyses, we conducted an optimal design. It was conducted by commercial optimization software. After generating the approximation model based on the DOE data, an optimal design was performed. As a result, the temperature distribution was improved compared to conventional designsen_US
dc.description.sponsorship본 연구를 위하여 PIDO 툴인 PIAnO 소프트 웨어를 제공한 ㈜피도텍에 감사 드립니다.en_US
dc.language.isoko_KRen_US
dc.publisher대한기계학회en_US
dc.subjectEvaporationen_US
dc.subjectOptimizationen_US
dc.subjectHeat Analysisen_US
dc.subject증착en_US
dc.subject최적화en_US
dc.subject열해석en_US
dc.title열해석 기반 증착 시스템 구조 최적 설계에 관한 연구en_US
dc.title.alternativeEvaporation system design optimization based on heat analysisen_US
dc.typeArticleen_US
dc.relation.no--
dc.relation.volume--
dc.relation.page1-4-
dc.contributor.googleauthor서민규-
dc.contributor.googleauthor최동훈-
dc.contributor.googleauthorSeo, Min Gyu-
dc.contributor.googleauthorChoi, Dong-Hoon-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MECHANICAL ENGINEERING-
dc.identifier.piddhchoi-
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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