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열해석 기반 증착 시스템 구조 최적 설계에 관한 연구

Title
열해석 기반 증착 시스템 구조 최적 설계에 관한 연구
Other Titles
Evaporation system design optimization based on heat analysis
Author
최동훈
Keywords
Evaporation; Optimization; Heat Analysis; 증착; 최적화; 열해석
Issue Date
2015-11
Publisher
대한기계학회
Citation
대한기계학회 창립 70주년 기념 학술대회, 2015.11, Page. 3488-3491
Abstract
One of the most affective factors for thin film uniformity in vacuum deposition system is temperature distribution. In this research, design optimization based on CAE which is related to thermal analysis was performed to minimize temperature distribution in evaporation system. In order to minimize the distribution, various parts of evaporation system were changed within the design range. Heat Analysis was performed using ABAQUS. Based on thermal analysis results which are obtained from various analyses, we conducted an optimal design. It was conducted by commercial optimization software. After generating the approximation model based on the DOE data, an optimal design was performed. As a result, the temperature distribution was improved compared to conventional designs
URI
http://www.dbpia.co.kr/Article/NODE06576401http://hdl.handle.net/20.500.11754/28902
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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