Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이관수 | - |
dc.date.accessioned | 2017-08-04T05:42:45Z | - |
dc.date.available | 2017-08-04T05:42:45Z | - |
dc.date.issued | 2015-10 | - |
dc.identifier.citation | AEROSOL SCIENCE AND TECHNOLOGY, v. 49, NO 10, Page. 920-927 | en_US |
dc.identifier.issn | 0278-6826 | - |
dc.identifier.issn | 1521-7388 | - |
dc.identifier.uri | http://www.tandfonline.com/doi/full/10.1080/02786826.2015.1085952 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/28304 | - |
dc.description.abstract | In this study, the Gaussian Diffusion Sphere Model (GDSM) and the Statistical Lagrangian Particle Tracking (SLPT) approach were employed and adjusted to calculate the local deposition velocity onto a flat plate in horizontal airflow. The GDSM and the SLPT approach were validated by comparing the predicted local deposition velocities with those determined by solving the equation of convective diffusion. Both the GDSM and the SLPT approach were found to be accurate in calculating the local deposition velocity onto a flat plate in horizontal airflow. In addition, the GDSM was much more efficient than the SLPT approach in terms of the calculation time. Finally, a parametric study on the local deposition velocity onto a flat plate exposed to horizontal airflow was performed using the GDSM with the consideration of the effects of the gravity, convection, diffusion, and thermophoresis. | en_US |
dc.description.sponsorship | This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT & Future Planning (grant number: NRF-2013R1A1A1A05010781). | en_US |
dc.language.iso | en | en_US |
dc.publisher | TAYLOR & FRANCIS INC | en_US |
dc.subject | PARTICLE DEPOSITION | en_US |
dc.subject | SEMICONDUCTOR WAFERS | en_US |
dc.subject | PARALLEL-FLOW | en_US |
dc.subject | EUVL MASKS | en_US |
dc.subject | CLEAN ROOM | en_US |
dc.subject | SURFACE | en_US |
dc.subject | ELECTROPHORESIS | en_US |
dc.subject | DIFFUSION | en_US |
dc.subject | FIELD | en_US |
dc.title | Local Behavior of Deposition Velocity onto a Flat Plate in Horizontal Airflow under the Influence of Thermophoresis | en_US |
dc.type | Article | en_US |
dc.relation.no | 10 | - |
dc.relation.volume | 49 | - |
dc.identifier.doi | 10.1080/02786826.2015.1085952 | - |
dc.relation.page | 920-927 | - |
dc.relation.journal | AEROSOL SCIENCE AND TECHNOLOGY | - |
dc.contributor.googleauthor | Woo, Sang-Hee | - |
dc.contributor.googleauthor | Lee, Kwan-Soo | - |
dc.contributor.googleauthor | Yook, Se-Jin | - |
dc.relation.code | 2015001525 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MECHANICAL ENGINEERING | - |
dc.identifier.pid | ksleehy | - |
dc.identifier.researcherID | C-5584-2015 | - |
dc.identifier.orcid | http://orcid.org/0000-0003-0463-8514 | - |
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