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dc.contributor.author육세진-
dc.date.accessioned2017-07-19T04:58:55Z-
dc.date.available2017-07-19T04:58:55Z-
dc.date.issued2015-10-
dc.identifier.citationAEROSOL SCIENCE AND TECHNOLOGY, v. 49, NO 10, Page. 920-927en_US
dc.identifier.issn0278-6826-
dc.identifier.issn1521-7388-
dc.identifier.urihttp://www.tandfonline.com/doi/abs/10.1080/02786826.2015.1085952-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/27924-
dc.description.abstractIn this study, the Gaussian Diffusion Sphere Model (GDSM) and the Statistical Lagrangian Particle Tracking (SLPT) approach were employed and adjusted to calculate the local deposition velocity onto a flat plate in horizontal airflow. The GDSM and the SLPT approach were validated by comparing the predicted local deposition velocities with those determined by solving the equation of convective diffusion. Both the GDSM and the SLPT approach were found to be accurate in calculating the local deposition velocity onto a flat plate in horizontal airflow. In addition, the GDSM was much more efficient than the SLPT approach in terms of the calculation time. Finally, a parametric study on the local deposition velocity onto a flat plate exposed to horizontal airflow was performed using the GDSM with the consideration of the effects of the gravity, convection, diffusion, and thermophoresis.en_US
dc.description.sponsorshipThis research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT & Future Planning (grant number: NRF-2013R1A1A1A05010781).en_US
dc.language.isoenen_US
dc.publisherTAYLOR & FRANCIS INCen_US
dc.subjectPARTICLE DEPOSITIONen_US
dc.subjectSEMICONDUCTOR WAFERSen_US
dc.subjectPARALLEL-FLOWen_US
dc.subjectEUVL MASKSen_US
dc.subjectCLEAN ROOMen_US
dc.subjectSURFACEen_US
dc.subjectELECTROPHORESISen_US
dc.subjectDIFFUSIONen_US
dc.subjectFIELDen_US
dc.titleLocal Behavior of Deposition Velocity onto a Flat Plate in Horizontal Airflow under the Influence of Thermophoresisen_US
dc.typeArticleen_US
dc.relation.no10-
dc.relation.volume49-
dc.identifier.doi10.1080/02786826.2015.1085952-
dc.relation.page920-927-
dc.relation.journalAEROSOL SCIENCE AND TECHNOLOGY-
dc.contributor.googleauthorWoo, Sang-Hee-
dc.contributor.googleauthorLee, Kwan-Soo-
dc.contributor.googleauthorYook, Se-Jin-
dc.relation.code2015001525-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF MECHANICAL ENGINEERING-
dc.identifier.pidysjnuri-
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COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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