Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2017-04-19T00:50:25Z | - |
dc.date.available | 2017-04-19T00:50:25Z | - |
dc.date.issued | 2015-08 | - |
dc.identifier.citation | PHYSICS OF PLASMAS, v. 22, NO 8, Page. 1-7 | en_US |
dc.identifier.issn | 1070-664X | - |
dc.identifier.issn | 1089-7674 | - |
dc.identifier.uri | http://aip.scitation.org/doi/abs/10.1063/1.4928907 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/26789 | - |
dc.description.abstract | Vibrational temperature (T-vib) of N-2 gas and electron energy distribution function (EEDF) were measured in Ar/N-2 mixture inductively coupled plasma (ICP). At a low gas pressure of 5 mTorr where the EEDF is bi-Maxwellian distribution, plasma density n(p) and T-vib (from 7000K to 5600 K) slightly decrease. However, remarkable decrease in n(p) and T-vib is found with the dilution of N-2 gas at a high gas pressure of 50 mTorr, where the EEDF is depleted Maxwellian distribution at a fixed ICP power of 150 W. When the ICP power increases from 150 W to 300 W at the gas pressure of 50 mTorr, the depleted tail on the EEDF is replenished, while n(p) is little changed with the dilution of N-2 gas. In this case, T-vib slightly decreases from 9500 K to 7600 K. These results indicate that the variation of T-vib is strongly correlated to the plasma parameters, such as the plasma density and EEDF. (C) 2015 AIP Publishing LLC. | en_US |
dc.description.sponsorship | This work was supported by the Converging Research Center Program (NRF-2014M3C1A8053701) and the National R&D Program (NRF-2014M1A7A1A03045185) of the National Research Foundation of Korea funded by the Ministry of Education, Science, and Technology, and this work was supported by the Korea Electric Power Corporation Research Institute through Korea Electrical Engineering & Science Research Institute (R14XA02-3). | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | ENERGY DISTRIBUTION FUNCTION | en_US |
dc.subject | GAS TEMPERATURE | en_US |
dc.subject | RF DISCHARGE | en_US |
dc.subject | NITROGEN | en_US |
dc.subject | ARGON | en_US |
dc.subject | BANDS | en_US |
dc.subject | O-2 | en_US |
dc.subject | CH | en_US |
dc.title | Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas | en_US |
dc.type | Article | en_US |
dc.relation.no | 8 | - |
dc.relation.volume | 22 | - |
dc.identifier.doi | 10.1063/1.4928907 | - |
dc.relation.page | 1-7 | - |
dc.relation.journal | PHYSICS OF PLASMAS | - |
dc.contributor.googleauthor | Kim, Young-Cheol | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Kim, Yu-Sin | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2015001483 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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