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Characterization of Sputter-Deposited LiZr2(PO4)(3) Thin Film Solid Electrolyte

Title
Characterization of Sputter-Deposited LiZr2(PO4)(3) Thin Film Solid Electrolyte
Author
윤종승
Keywords
LITHIUM LANTHANUM TITANATE; IONIC-CONDUCTIVITY; BATTERIES; STATE; MICROBATTERIES; MOBILITY; NASICON
Issue Date
2015-07
Publisher
ELECTROCHEMICAL SOC INC
Citation
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v. 162, NO 10, Page. 2080-2084
Abstract
320-nm-thick LiZr2(PO4)(3) thin film was prepared by radio frequency sputtering and thermally annealed up to 1000 degrees C to fully crystallize the as-deposited film. The room-temperature ionic conductivity of the film annealed at 800 degrees C was 1.3 x 10(-7) S/cm which was inferior compared to its bulk counterpart due to the partial crystallization and small grain size; however, at an elevated temperature, the ionic conductivity approached the bulk value, reaching 4.0 x 10(-6) S/cm above 100 degrees C. It was demonstrated that combined with chemical stability of LiZr2(PO4)(3) and low electronic conductivity, the LiZr2(PO4)(3) thin film can be a possible candidate material for a solid electrolyte operating at an elevated temperature. (C) 2015 The Electrochemical Society. All rights reserved.
URI
http://jes.ecsdl.org/content/162/10/A2080.shorthttp://hdl.handle.net/20.500.11754/26538
ISSN
0013-4651; 1945-7111
DOI
10.1149/2.0501510jes
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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