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dc.contributor.author정진욱-
dc.date.accessioned2017-03-30T05:44:43Z-
dc.date.available2017-03-30T05:44:43Z-
dc.date.issued2015-07-
dc.identifier.citationCURRENT APPLIED PHYSICS, v. 15, NO 9, Page. 1036-1041en_US
dc.identifier.issn1567-1739-
dc.identifier.issn1878-1675-
dc.identifier.urihttp://www.sciencedirect.com/science/article/pii/S1567173915300055-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/26450-
dc.description.abstractSpatial distributions of the effective electron temperature (T-eff) and plasma potential were studied from the measurement of an electron energy probability function in a side type ferrite-core inductively coupled plasma with an argonehelium-mixture. As the helium gas was diluted at the fixed total gas pressure of 5 mTorr in an argon discharge, the distribution of the plasma density and plasma potential changed from a concave to a flat profile, and finally became a convex profile, while all spatial profiles of T-eff were hollow shapes with helium dilution in the argon discharge. This evolution of the plasma potential with helium gas could be explained by the increased energy relaxation length (lambda(e)), indicating the transition of electron kinetics from local to non-local kinetics. (C) 2015 Elsevier B.V. All rights reserved.en_US
dc.description.sponsorshipThis work was supported by the Industrial Strategic Technology Development Program (10041681, 10050500) funded by the Ministry of Trade, Industry & Energy (MI, Korea) and also partially supported by research funds of Chonbuk National University in 2015.en_US
dc.language.isoenen_US
dc.publisherELSEVIER SCIENCE BVen_US
dc.subjectElectron energy distribution functionen_US
dc.subjectElectron heating mechanismen_US
dc.subjectInductively coupled plasmaen_US
dc.subjectFerrite core ICPen_US
dc.titleMeasurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmasen_US
dc.typeArticleen_US
dc.relation.no9-
dc.relation.volume15-
dc.identifier.doi10.1016/j.cap.2015.06.018-
dc.relation.page1036-1041-
dc.relation.journalCURRENT APPLIED PHYSICS-
dc.contributor.googleauthorHan, Duksun-
dc.contributor.googleauthorLee, Hyo-Chang-
dc.contributor.googleauthorBang, Jin-Young-
dc.contributor.googleauthorChung, Chin-Wook-
dc.contributor.googleauthorMoon, Se Youn-
dc.relation.code2015001919-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING-
dc.identifier.pidjoykang-
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COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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