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Effect of fluid losses and acoustic resonances in CMUTs with vented cavities

Title
Effect of fluid losses and acoustic resonances in CMUTs with vented cavities
Author
박관규
Keywords
high pressure; Airborne ultrasound; CMUT; wide bandwidth; Navier-Stokes equations
Issue Date
2015-06
Publisher
IEEE
Citation
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, Page. 682-685
Abstract
We report on capacitive micromachined ultrasonic transducers (CMUTs) with vented cavities for varying their bandwidth and sensitivity in airborne applications. The devices are simulated using a finite element model which incorporates viscous and thermal fluid losses in the squeeze film and the vent holes, as well as acoustic radiation and acoustic resonance in the backing. Our model accurately predicts the behavior of such CMUTs. The model is also validated with measurements at elevated pressure.
URI
http://ieeexplore.ieee.org/document/7181015/http://hdl.handle.net/20.500.11754/25467
ISBN
978-1-4799-8955-3
ISSN
2164-1641; 2159-547X
DOI
10.1109/TRANSDUCERS.2015.7181015
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
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