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dc.contributor.author정진욱-
dc.date.accessioned2016-07-21T00:53:46Z-
dc.date.available2016-07-21T00:53:46Z-
dc.date.issued2015-02-
dc.identifier.citationAPPLIED PHYSICS LETTERS, v. 106, NO 7, Page. 1-3en_US
dc.identifier.issn0003-6951-
dc.identifier.issn1077-3118-
dc.identifier.urihttp://scitation.aip.org/content/aip/journal/apl/106/7/10.1063/1.4906575-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/22137-
dc.description.abstractThe radial profiles of the electron density at the bottom wall were measured from the center to the edge at argon 3 mTorr with an RF power of 200 W. Since the Boltzmann relation in terms of the fluid picture only describes the behavior of the confined particles, the escaping electrons, which are not confined in plasmas, were not expected to follow the Boltzmann relation. However, unexpected results were observed. The spatial profiles of the density of escaping electrons and the floating potential were well described by the Boltzmann relation with the electron temperature. Moreover, it was concluded that the behavior of the escaping electrons is also described by the generalized Boltzmann relation in terms of the kinetic model. (C) 2015 AIP Publishing LLC.en_US
dc.description.sponsorshipConverging Research Center Program National R&D Program of the National Research Foundation of Korea - Ministry of Education, Science, and Technologyen_US
dc.language.isoenen_US
dc.publisherAMER INST PHYSICSen_US
dc.subjectBoltzmann equationsen_US
dc.subjectElectric measurementsen_US
dc.subjectAntennasen_US
dc.subjectPlasma confinementen_US
dc.subjectCoilsen_US
dc.titleExperimental verification of the Boltzmann relation at the wall in inductively coupled plasmasen_US
dc.typeArticleen_US
dc.relation.no7-
dc.relation.volume106-
dc.identifier.doi10.1063/1.4906575-
dc.relation.page1-3-
dc.relation.journalAPPLIED PHYSICS LETTERS-
dc.contributor.googleauthor정진욱-
dc.contributor.googleauthorChung, Chin-Wook-
dc.contributor.googleauthorKim, Young-Cheol-
dc.contributor.googleauthorKim, June Young-
dc.contributor.googleauthorLee, Hyo-Chang-
dc.contributor.googleauthorKim, Yu-Sin-
dc.contributor.googleauthorKim, Jin-Yong-
dc.contributor.googleauthorCho, Sung-Won-
dc.relation.code2015002886-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING-
dc.identifier.pidjoykang-
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COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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