456 0

Full metadata record

DC FieldValueLanguage
dc.contributor.author오성근-
dc.date.accessioned2016-05-24T04:19:30Z-
dc.date.available2016-05-24T04:19:30Z-
dc.date.issued2015-01-
dc.identifier.citationSCIENCE OF ADVANCED MATERIALS, v. 7, Page. 127-132en_US
dc.identifier.issn1947-2935-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/21286-
dc.identifier.urihttp://www.ingentaconnect.com/content/asp/sam/2015/00000007/00000001/art00019-
dc.description.abstractThe damage to the surface structure of Anodic Aluminum Oxide (AAO) caused by plasma and heat is evaluated with respect to the sealing time (0, 10, 30 and 60 minutes). With 10 minutes sealing time of the oxide layer, the leakage current is abruptly reduced, while the breakdown voltage and permittivity are rapidly improved. Longer sealing after 10 minutes makes less efficiencies. In the samples sealed for 30 or 60 minutes, more cracks are generated by plasma and heat treatments, result in the reduction of the breakdown voltage. Sealing longer than 10 minutes produces much contamination particles by plasma treatment. The resistance to plasma and heat is improved with a sealing time of 10 minutes.en_US
dc.language.isoenen_US
dc.publisherAMER SCIENTIFIC PUBLISHERSen_US
dc.subjectAluminum oxideen_US
dc.subjectAnodizingen_US
dc.subjectContamination particlesen_US
dc.subjectPlasma resistanceen_US
dc.subjectSealingen_US
dc.titleEffect of Sealing Time of Anodic Aluminum Oxide (AAO) Film for Preventing Plasma Damageen_US
dc.typeArticleen_US
dc.relation.volume7-
dc.identifier.doi10.1166/sam.2015.2091-
dc.relation.page127-132-
dc.relation.journalSCIENCE OF ADVANCED MATERIALS-
dc.contributor.googleauthorSong, Je-Boem-
dc.contributor.googleauthorKim, Jin-Tae-
dc.contributor.googleauthorOh, Seong-Geun-
dc.contributor.googleauthorShin, Jae-Soo-
dc.contributor.googleauthorChun, Je-Ran-
dc.contributor.googleauthorYun, Ju-Young-
dc.relation.code2015008031-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF ENGINEERING[S]-
dc.sector.departmentDEPARTMENT OF CHEMICAL ENGINEERING-
dc.identifier.pidseongoh-
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > CHEMICAL ENGINEERING(화학공학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE