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2016-10
Optimizing a blend of a mixture slurry in chemical mechanical planarization for advanced semiconductor manufacturing using a posterior preference articulation approach to dual response surface optimization
이동희
2016-12
OPTIMIZING MULTIPLE RESPONSE VARIABLES OF CHEMICAL AND MECHANICAL PLANARIZATION PROCESS FOR SEMICONDUCTOR FABRICATION USING A CLUSTERING METHOD
이동희
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chemical and mechanical planariza...
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CMP
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dual response surface optimization
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process optimization
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semiconductor
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slurry
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2016
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