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Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV)

Title
Effect of Pulse Current and Pre-annealing on Thermal Extrusion of Cu in Through-Silicon via (TSV)
Author
유봉영
Keywords
pre-annealing; pulse current; seed layer; thermal extrusion; through-silicon-via (TSV)
Issue Date
2020-10
Publisher
FRONTIERS MEDIA SA
Citation
FRONTIERS IN CHEMISTRY, v. 8, Article no. 771, 8pp
Abstract
Thermal stress induced by annealing the Cu filling of through-silicon vias (TSVs) requires further investigation as it can inhibit the performance of semiconductor devices. This study reports the filling behavior of TSVs prepared using direct current and pulse current Cu electrodeposition with and without pre-annealing. The thermal extrusion of Cu inside the TSVs was studied by observing the extrusion behavior after annealing and the changes in grain orientation using scanning electron microscopy and electron backscatter diffraction. The bottom-up filling ratio achieved by the direct current approach decreased because the current was used both to fill the TSV and to grow bump defects on the top surface of the wafer. In contrast, pulse current electrodeposition yielded an improved TSV bottom-up filling ratio and no bump defects, which is attributable to strong suppression and thin diffusion layer. Moreover, Cu deposited with a pulse current exhibited lesser thermal extrusion, which was attributed to the formation of nanotwins and a change in the grain orientation from random to (101). Based on the results, thermal extrusion of the total area of the TSVs could be obtained by pulse current electrodeposition with pre-annealing. © Copyright © 2020 Kim, Jin, Park, Lee, Lim and Yoo.
URI
https://www.frontiersin.org/articles/10.3389/fchem.2020.00771/fullhttps://repository.hanyang.ac.kr/handle/20.500.11754/165866
ISSN
2296-2646
DOI
10.3389/fchem.2020.00771
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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