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Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In2O3 nanofibers integrated on low power MEMS platform

Title
Improved formaldehyde gas sensing properties of well-controlled Au nanoparticle-decorated In2O3 nanofibers integrated on low power MEMS platform
Author
김현중
Keywords
Gold nanoparticle; In2O3 nanofiber; Formaldehyde; Gas sensor; Low power; Micro-platform
Issue Date
2020-02
Publisher
JOURNAL MATER SCI TECHNOL
Citation
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, v. 38, page. 56-63
Abstract
Approaches for the fabrication of a low power-operable formaldehyde (HCHO) gas sensor with high sensitivity and selectivity were performed by the utilization of an effective micro-structured platform with a micro-heater to reach high temperature with low heating power as well as by the integration of indium oxide (In2O3) nanofibers decorated with well-dispersed Au nanoparticles as a sensing material. Homogeneous In2O3 nanofibers with the large specific surface area were prepared by the electrospinning following by calcination process. Au nanoparticles with the well-controlled size as a catalyst were synthesized on the surface of In2O3 nanofibers. The Au-decorated In2O3 nanofibers were reliably integrated as sensing materials on the bridge-type micro-platform including micro-heaters and micro-electrodes. The micro-platform designed to maintain high temperature with low power consumption was fabricated by a microelectromechanical system (MEMS) technique. The micro-platform gas sensor consisting with Au-In2O3 nanofibers were fabricated effectively to detect HCHO gases with high sensitivity and selectivity. The HCHO gas sensing behaviors were schematically studied as a function of the gas concentration, the size of the adsorbed Au nanoparticles, the applied power to raise the temperature of a sensing part and the kind of target gases. (C) 2019 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.
URI
https://www.sciencedirect.com/science/article/pii/S1005030219303263?via%3Dihubhttps://repository.hanyang.ac.kr/handle/20.500.11754/165660
ISSN
1005-0302
DOI
10.1016/j.jmst.2019.09.002
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > EARTH RESOURCES AND ENVIRONMENTAL ENGINEERING(자원환경공학과) > Articles
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