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dc.contributor.author안유민-
dc.date.accessioned2021-04-28T00:08:21Z-
dc.date.available2021-04-28T00:08:21Z-
dc.date.issued2000-04-
dc.identifier.citation전기학회논문지 C, v. 50C, no. 2, page. 86-95en_US
dc.identifier.issn1229-246X-
dc.identifier.urihttps://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01276297-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/161781-
dc.description.abstractMechanical properties of electroplated gold microstructures were determined from the micromachined beam structures. Cantilever and bridge beam structures of different length were fabricated by electroplating - surface micromachining technique, which is specially designed to realize an anchor structure close to an ideal fixed-boundary condition. Fabricated beams were electrostatically excited and their resonance frequencies were measured by optical system composed of laser displacement meter with dynamic signal analyzer. Young's modulus and mean residual stress were calculated from the measured frequencies of microbeams. In addition, stress gradient was measured using deformation of released cantilever beam structure.en_US
dc.description.sponsorship본 연구는 한국과학재단 특정연구과제 연구비 지 원(과제번호 : 96-0102-10-1-3)에 의해 수행되었습니 다.en_US
dc.language.isoko_KRen_US
dc.publisher대한전기학회en_US
dc.subjectYoung's modulusen_US
dc.subjectresidual stressen_US
dc.subjectstress gradienten_US
dc.subjectelectroplated golden_US
dc.subjectresonance frequencyen_US
dc.title전해 도금된 마이크로 금 구조물의 기계적 특성 측정en_US
dc.title.alternativeMeasurements of the Mechanical Properties of Electroplated Gold Microstructureen_US
dc.typeArticleen_US
dc.relation.journal국내Proceeding(기타)-
dc.contributor.googleauthor백창배-
dc.contributor.googleauthor김용권-
dc.contributor.googleauthor안유민-
dc.relation.code2012101921-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF ENGINEERING SCIENCES[E]-
dc.sector.departmentDEPARTMENT OF MECHANICAL ENGINEERING-
dc.identifier.pidahnym-
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COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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