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전해 도금된 마이크로 금 구조물의 기계적 특성 측정

Title
전해 도금된 마이크로 금 구조물의 기계적 특성 측정
Other Titles
Measurements of the Mechanical Properties of Electroplated Gold Microstructure
Author
안유민
Keywords
Young's modulus; residual stress; stress gradient; electroplated gold; resonance frequency
Issue Date
2000-04
Publisher
대한전기학회
Citation
전기학회논문지 C, v. 50C, no. 2, page. 86-95
Abstract
Mechanical properties of electroplated gold microstructures were determined from the micromachined beam structures. Cantilever and bridge beam structures of different length were fabricated by electroplating - surface micromachining technique, which is specially designed to realize an anchor structure close to an ideal fixed-boundary condition. Fabricated beams were electrostatically excited and their resonance frequencies were measured by optical system composed of laser displacement meter with dynamic signal analyzer. Young's modulus and mean residual stress were calculated from the measured frequencies of microbeams. In addition, stress gradient was measured using deformation of released cantilever beam structure.
URI
https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01276297https://repository.hanyang.ac.kr/handle/20.500.11754/161781
ISSN
1229-246X
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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