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dc.contributor.author김곤호-
dc.date.accessioned2021-04-27T00:24:04Z-
dc.date.available2021-04-27T00:24:04Z-
dc.date.issued2000-05-
dc.identifier.citationPLASMA SOURCES SCIENCE & TECHNOLOGY, v. 9, no. 2, page. 97-107en_US
dc.identifier.issn0963-0252-
dc.identifier.urihttps://iopscience.iop.org/article/10.1088/0963-0252/9/2/302-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/161725-
dc.description.abstractThe Omegatron mass spectrometer, originally developed for measuring atomic constants, was employed for measuring both positive ions and negative ions in high density, electron cyclotron resonance etching plasmas. The main disadvantages of the conventional design of the Omegatron include the observation of resonance frequency shifts and poor mass resolution in a relatively weak magnetic field. Based on 2D numerical analysis, several modifications were carried out to overcome these limitations: the (±) ion collector, differential pumping, different RF excitation methods, an additional magnet for uniform magnetic field, etc. Experimental results indicated the presence of H-and H- 2in H2plasmas, and F-and CF-in CF4plasmas.en_US
dc.language.isoen_USen_US
dc.publisherIOP Publishing Ltden_US
dc.subjectConductivityen_US
dc.subjectGene Conversionen_US
dc.subjectPhotonic Crystalsen_US
dc.titleDesign and operation of an omegatron mass spectrometer for measurements of positive and negative ion species in electron cyclotron resonance plasmasen_US
dc.typeArticleen_US
dc.identifier.doi10.1088/0963-0252/9/2/302-
dc.relation.journalPLASMA SOURCES SCIENCE & TECHNOLOGY-
dc.contributor.googleauthorKoo, Bon-Woong-
dc.contributor.googleauthorHershkowitz, Noah-
dc.contributor.googleauthorYan, Shiluo-
dc.contributor.googleauthorKim, Gon-Ho-
dc.relation.code2012207690-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF SCIENCE & TECHNOLOGY[E]-
dc.sector.departmentDIVISION OF SCIENCE & TECHNOLOGY-
dc.identifier.pidghkim-
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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > ETC
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