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Enhancement of gas sensing by implantation of Sb-ions in SnO2 nanowires

Title
Enhancement of gas sensing by implantation of Sb-ions in SnO2 nanowires
Author
김현우
Keywords
Sb-implantation; SnO2 nanowire; Gas sensor; NO2; Sensing mechanism
Issue Date
2020-02
Publisher
ELSEVIER SCIENCE SA
Citation
SENSORS AND ACTUATORS B-CHEMICAL, v. 304, Page. 1-10
Abstract
We describe gas sensing improvements of SnO2 nanowire (NW) gas sensors by Sb-ion implantation. SnO2 NWs were grown through a vapor-liquid-solid growth technique and Sb-ion implantation was performed by an ion implanter at different doses of 2x10(13), 2x10(14), and 2x10(15) ion/cm(2). The morphology and chemical compositions were confirmed by different characterization techniques. Gas sensing results demonstrated the gas sensing improvement by Sb-implantation, where the lowest dose gas sensor showed the best performance towards tested gases. However, high doses led to a reduced sensing response. We suggested the related sensing mechanism based not only on change of electron concentration by substituting Sn4+ ions to Sb+5 ions, but also on generation of surface defects. This study can open new possibilities to use ion-implantation as promising way to enhance the sensing capability of different gas sensors.
URI
https://www.sciencedirect.com/science/article/pii/S0925400519315060?via%3Dihubhttps://repository.hanyang.ac.kr/handle/20.500.11754/161563
ISSN
0925-4005
DOI
10.1016/j.snb.2019.127307
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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