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Synthesis and characterization of lead (IV) precursors and their conversion to PZT materials through a CVD process

Title
Synthesis and characterization of lead (IV) precursors and their conversion to PZT materials through a CVD process
Author
구상만
Keywords
Lead precursors; beta-Ketonate ligand; Silylamides; MOCVD process; PZT materials
Issue Date
2020-02
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Citation
POLYHEDRON, v. 177, article no. 114270
Abstract
New Pb(IV) precursors for lead zirconate titanate (PZT) thin films were synthesized, and their solid-state structures were elucidated by single-crystal X-ray crystallography. First, tetraphenyl lead (Ph4Pb) was synthesized from the reaction of PbCl2 with the Grignard reagent, PhMgBr, by a published method. Two of the phenyl ligands in Ph4Pb were replaced by bromines, and then were substituted with bis (trimethylsilyl)amides (btsa) to yield Ph2Pb(btsa)(2) (1), or with 2,2.6,6-tetramethyl-3.5-heptadiketonate (thd) ligands to yield Ph2Pb(thd)(2) (2). Single crystals of these two new Pb(IV) precursors were obtained by recrystallization in hexane, and their chemical compositions were characterized by FT-IR and H-1 NMR. In TG analyses, both compounds exhibited sharp decomposition curves, with major mass losses in the region of 200-250 degrees C. PZT films were fabricated from one of the newly prepared Pb(IV) precursors by an MOCVD process involving Ti((OPr)-Pr-i)(4), and Zr(OPr)(4), and the development of the perovskite phase with temperature was monitored by an XRD method.
URI
https://www.sciencedirect.com/science/article/pii/S0277538719307156?via%3Dihubhttps://repository.hanyang.ac.kr/handle/20.500.11754/161531
ISSN
0277-5387
DOI
10.1016/j.poly.2019.114270
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > CHEMICAL ENGINEERING(화학공학과) > Articles
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