2단계 증착법을 이용하여 증착한 ZnO 박막의 열처리 효과 분석

Abstract

본 연구에서는 ZnO 박막의 배향특성 및 결정성을 향상시키기 위해서 2단계 증착법으로 증착하였다. ZnO th in films are deposited on S i 0 2 / S i ( l l l ) substrate by RF magnetron sputtering. The two-step deposition method is proposed to enhance both the c-axis orientation and the resistivity of ZnO films. This method consists of the following two procedures: the lst-deposition for 30 min w ithout oxygen at 100W and the 2nd~deposition with oxygen added in the range of 02/(Ar+C)2) = 1ᄋ〜50%. Effects of therma l treatm en t on the properties of ZnO films are systematically investigated.