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2단계 증착법을 이용하여 증착한 ZnO 박막의 열처리 효과 분석

Title
2단계 증착법을 이용하여 증착한 ZnO 박막의 열처리 효과 분석
Other Titles
Characterization of Heat Treatment Effects on ZnO Films Deposited by Two-step Method
Author
이진복이명호이혜정박진석
Issue Date
2001-11
Publisher
대한전기학회
Citation
대한전기학회 전기물성·응용부문회 2001 추계학술대회 논문집, page. 3-5
Abstract
본 연구에서는 ZnO 박막의 배향특성 및 결정성을 향상시키기 위해서 2단계 증착법으로 증착하였다. ZnO th in films are deposited on S i 0 2 / S i ( l l l ) substrate by RF magnetron sputtering. The two-step deposition method is proposed to enhance both the c-axis orientation and the resistivity of ZnO films. This method consists of the following two procedures: the lst-deposition for 30 min w ithout oxygen at 100W and the 2nd~deposition with oxygen added in the range of 02/(Ar+C)2) = 1ᄋ〜50%. Effects of therma l treatm en t on the properties of ZnO films are systematically investigated.
URI
https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01321815?https://repository.hanyang.ac.kr/handle/20.500.11754/161503
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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