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Surface modification of micromolds by fluorocarbon films

Title
Surface modification of micromolds by fluorocarbon films
Author
안유민
Keywords
Micromolds; Fluorocarbon; PDMS; Soft lithography; AFM
Issue Date
2002-11
Publisher
Kluwer Academic Publishers
Citation
Micro Total Analysis Systems 2002, v. 1, page. 440-442
Abstract
CVD fluorocarbon (FC) thin films were deposited on mold surfaces such as silicon and SU-8 to reduce the adhesion of surfaces with PDMS during molding processes. FC films coated silicon and SU-8 mold surface showed no degradation of PDMS surfaces and good nanotribological characteristics.
URI
https://link.springer.com/chapter/10.1007/978-94-010-0295-0_147https://repository.hanyang.ac.kr/handle/20.500.11754/157881
ISBN
978-94-010-3952-9; 978-94-010-0295-0
DOI
10.1007/978-94-010-0295-0_147
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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