Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)MECHANICAL ENGINEERING(기계공학과)Articles
173
0
Surface Modification of Micromolds by Flurocarbon Films
- Title
- Surface Modification of Micromolds by Flurocarbon Films
- Author
- 조남규
- Keywords
- Micromolds; Fluorocarbon; PDMS; Soft lithography; AFM
- Issue Date
- 2002-11
- Publisher
- Kluwer Academic Publishers
- Citation
- Micro Total Analysis Systems 2002, v. 1, page. 440-442
- Abstract
- CVD fluorocarbon (FC) thin films were deposited on mold surfaces such as silicon and SU-8 to reduce the adhesion of surfaces with PDMS during molding processes. FC films coated silicon and SU-8 mold surface showed no degradation of PDMS surfaces and good nanotribological characteristics.
- URI
- https://link.springer.com/chapter/10.1007/978-94-010-0295-0_147https://repository.hanyang.ac.kr/handle/20.500.11754/157880
- ISBN
- 978-94-010-3952-9; 978-94-010-0295-0
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
