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XPS and XRR studies on microstructures and interfaces of DLC films deposited by FCVA method

Title
XPS and XRR studies on microstructures and interfaces of DLC films deposited by FCVA method
Author
박진석
Keywords
Filtered cathodic vacuum arc; X-ray photoelectron spectroscopy; X-ray reflectivity; Diamond-like carbon
Issue Date
2002-12
Publisher
ELSEVIER SCIENCE SA
Citation
Thin Solid Films, v. 420-421, page. 235-240
Abstract
Diamond-like carbon (DLC) films have been deposited at room temperature using a filtered cathodic vacuum arc technique. The influence of the negative bias voltage applied to the substrate from 0 to -250 V on the sp(3) hybridized carbon fraction is studied by Raman spectroscopy, which is also compared with the result obtained from X-ray photoelectron spectroscopy (XPS) for C 1s core peak. Based on the depth profiles for C 1s, Si 2p, and O 1s XPS peaks, the DLC film is modeled as a structure having three different layers, such as surface, bulk, and interface. In addition, the X-ray reflectivity is proposed as a method for estimating the density, surface roughness, and thickness of the layers constituting the DLC film. The estimated thickness of DLC film shows good agreement with the result obtained from the transmission electron microscope measurement. (C) 2002 Elsevier Science B.V. All rights reserved.
URI
http://www.sciencedirect.com/science/article/pii/S0040609002007502https://repository.hanyang.ac.kr/handle/20.500.11754/157820
ISSN
0040-6090
DOI
10.1016/S0040-6090(02)00750-2
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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