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대기압 반응로 내 코로나 이온을 이용한 나노입자 형상의 제어

Title
대기압 반응로 내 코로나 이온을 이용한 나노입자 형상의 제어
Other Titles
Corona Ion Assisted Nano-Particle Morphology Control in an Atmospheric Pressure Furnace Reactor
Author
안강호
Keywords
Ultrafine S i0 2 Particles(초미세 실리콘 입자); Corona Discharge(코로나 방전); Furnace(노); Size Distributicon(크기 분포); Morphology(형상); Charging Fraction(하전분율)
Issue Date
2002-07
Publisher
대한기계학회
Citation
Transactions of the Korean Society of Mechanical Engineers - B, v. 26, no. 5, page. 710-715
Abstract
The spherical nonagglomerated and uniform nanometer-size S i02 particles are synthesized by the injection of TEOS vapor, ions and reaction gas in a furnace. Ions are generated by corona discharge and these ions charge S i02 particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions. Their morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 to 5.0 kV, it is observed that the mean diameter of S i02 particle decreases from 94 nm to 42 nm
URI
https://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE00530465https://repository.hanyang.ac.kr/handle/20.500.11754/157565
ISSN
1226-4881
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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