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dc.contributor.author좌용호-
dc.date.accessioned2021-01-26T01:35:45Z-
dc.date.available2021-01-26T01:35:45Z-
dc.date.issued2002-08-
dc.identifier.citationSurface and Coatings Technology, v. 162, issue. 2-3, page. 183-188en_US
dc.identifier.issn0257-8972-
dc.identifier.urihttp://www.sciencedirect.com/science/article/pii/S0257897202005832-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/157484-
dc.description.abstractThe wear behavior of Si–O containing diamond-like carbon (DLC) films was studied. The films were deposited by conventional plasma enhanced chemical vapor deposition system using methane and tetraethylorthosilicate as precursors of C and Si, respectively. The tribological properties of Si–O containing DLC films were evaluated using a ball-on-plate type tribometer and the wear factor of Si–O containing DLC films was calculated by measuring the wear track volume. A relationship between tribological and mechanical properties of the films was investigated. The microstructural observation on the worn surface of the films after the wear test was made. The micrographs of the wrinkling surface and buckling coating layer in the pure DLC film indicate that the film shows a relatively poor adhesion compared with the Si–O containing DLC film. This implies that the Si–O containing DLC film has a relatively good adhesion between the film and substrate.en_US
dc.description.sponsorshipThis study was financially supported by the Korean Science and Engineering Foundation (KOSEF) through the Ceramic Processing Research Center (CPRC) and also by the Core University Program between Hanyang University, Korea and Osaka University, Japan.en_US
dc.language.isoen_USen_US
dc.publisherELSEVIER SCIENCE SAen_US
dc.subjectDiamond-like filmen_US
dc.subjectPECVDen_US
dc.subjectWearen_US
dc.subjectRamanen_US
dc.subjectSEMen_US
dc.titleTribological evaluation of Si-O containing diamond-like carbon filmsen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/S0257-8972(02)00583-2-
dc.relation.journalSURFACE & COATINGS TECHNOLOGY-
dc.contributor.googleauthorYang, WonJae-
dc.contributor.googleauthorChoa, Yong-Ho-
dc.contributor.googleauthorSekino, Tohru-
dc.contributor.googleauthorShim, Kwang Bo-
dc.contributor.googleauthorNiihara, Koichi-
dc.contributor.googleauthorAuh, Keun Ho-
dc.relation.code2011208987-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF ENGINEERING SCIENCES[E]-
dc.sector.departmentDEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING-
dc.identifier.pidchoa15-
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COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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