레이저 마커용 빔 정렬장치의 공리적 설계

Abstract

The usage of beam scanning type laser marker is rapidly increasing in the field of semiconductor equipment. A device called "beam adjuster" is employed to adjust the visible diode laser, which points the marking position for various setting. The device is very sensitive to manufacturing tolerance and assembly condition. Axiomatic approach has been applied to the design of the device. An existing design is analyzed based on the Independence Axiom. The existing design is found to violate the axiom. Two new designs are proposed to satisfy the Independence Axiom. The Information Axiom is utilized to evaluate the designs. Adesign is selected to have the minimum information content. The significance of this research is that a full cycle of axiomatic design is applied to a real engineering product.