214 94

Spatial Monitoring of Wafer Map Defect Data Based on 2DWavelet Spectrum Analysis

Title
Spatial Monitoring of Wafer Map Defect Data Based on 2DWavelet Spectrum Analysis
Author
배석주
Keywords
image processing; condition based maintenance; statistical process control; wavelet spectrum; wafer bin map
Issue Date
2019-12
Publisher
MDPI
Citation
APPLIED SCIENCES-BASEL, v. 9, no. 24, article no. 5518
Abstract
Featured Application Image based manufacturing process diagnosis and clinical image data analysis for malignancy detection. Abstract Since machine vision systems (MVS) lead to a wide usage of monitoring systems for industrial applications, the research on the statistical process control (SPC) of image data has been promoted as an automated method for early detection and prevention of unusual conditions in manufacturing processes. In this paper, we propose a non-parametric SPC approach based on the 2D wavelet spectrum (WS-SPC) to extract the feature that contains the spatial and directional information of each subspace in an image. Using the 2D discrete wavelet transform and spectrum analysis, the representative statistic, the Hurst index, is calculated, and a single matrix space that consists of estimated statistics is reconstructed into a spatial control area for SPC. When a control limit is determined by the density of statistics, real-time monitoring based on WS-SPC is available for time releasing images. In the application, an analysis of wafer bin maps (WBMs) is conducted at a semiconductor company in Korea in order to evaluate the performance of the suggested approach. The results show that the proposed method is effective in terms of its fast computation speed and spectral monitoring.
URI
https://www.mdpi.com/2076-3417/9/24/5518https://repository.hanyang.ac.kr/handle/20.500.11754/157372
ISSN
2076-3417
DOI
10.3390/app9245518
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > INDUSTRIAL ENGINEERING(산업공학과) > Articles
Files in This Item:
Spatial Monitoring of Wafer Map Defect Data Based on 2D Wavelet Spectrum Analysis.pdfDownload
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE