Development of Multichannel Ellipsometry with Synchronously Rotating Polarizer and Analyzer

Abstract

Rotating polarizer and analyzer ellipsometry was developed with a multichannel detector. In this system, the transmission axes of polarizer and analyzer rotated in phase using flexible shaft for mechanical connection. With this configuration, auto-calibration for the azimuths of polarizer and analyzer was achieved. Thus, experimental error related to the calibration could be avoided and spectroscopic ellipsometry in the simplest operation principle was realized. Data acquisition time for 512 points ellipsometry spectra was 3 sec over the photon energy range of 1.5 to 4.5 eV.