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Investigation of Electrical Performance and Operational Stability of Sputtered InSnZnO (ITZO) Thin Film Transistors

Title
Investigation of Electrical Performance and Operational Stability of Sputtered InSnZnO (ITZO) Thin Film Transistors
Other Titles
RF 마그네트론 스퍼터링으로 증착한 InSnZnO 박막 트랜지스터의 전기적 특성 및 동작 안정성 연구
Author
맹서현
Alternative Author(s)
맹서현
Advisor(s)
김재균
Issue Date
2020-08
Publisher
한양대학교
Degree
Master
Abstract
We investigated the electrical properties and operational stability of amorphous indium-tin-zinc-oxide (a-ITZO) thin-films transistors (TFTs). We fabricated the a-ITZO TFTs using deposition by radio frequency sputtering at room temperature followed by a rapid thermal annealing (RTA) process at different temperatures and oxygen pressure (PO2). This is a more practical annealing route compared to a conventional furnace. Based on film densification and oxygen vacancy optimization, the a-ITZO TFTs exhibited 9.8 cm2/Vs, 0.82 V/decade and 1.39 V, for saturation mobility, sub-threshold swing and threshold voltage, respectively. Operation stability tests and hysteresis behavior of a-ITZO TFTs suggest that oxygen vacancy concentration of a-ITZO thin films gradually decreases under higher PO2, consequently affecting the threshold voltage and the shift seen after a gate bias stress test. This observation suggests that gate bias stress and hysteresis stability of an a-ITZO device is due to the effect of oxygen-controlled pressure in the RTA process. This a-ITZO TFTs electrical characterization qualitatively coincides with X-ray photoelectron spectroscopic analyses of oxygen vacancy concentration in a-ITZO thin films. Thus, our systematic a-ITZO thin film optimization using the oxygen-ambient RTA process is a practical basis for high-performance amorphous oxide semiconductor TFTs’ post-annealing methods.
URI
https://repository.hanyang.ac.kr/handle/20.500.11754/152952http://hanyang.dcollection.net/common/orgView/200000438183
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > DEPARTMENT OF PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Theses (Master)
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