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Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc Oxide

Title
Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc Oxide
Author
성명모
Keywords
spatially addressable library; combinatorial materials science; temperature gradient; atomic layer deposition (ALD); zinc oxide (ZnO); crystallinity
Issue Date
2019-06
Publisher
AMER CHEMICAL SOC
Citation
ACS COMBINATORIAL SCIENCE, v. 21, no. 6, Page. 445-455
Abstract
Though the synthesis of libraries of multi-component metal oxide systems is prevalent using the combinatorial approach, the combinatorial approach has been rarely realized in studying simple metal oxides, especially applied to the atomic layer deposition (ALD) technique. In this literature, a novel combinatorial approach technique is utilized within an ALD grown simple metal oxide to synthesize a "spatially addressable combinatorial library". The two key factors in gradients were defined during the ALD process: (1) the process temperature and (2) a nonuniform flow of pulsed gases inside a cross-flow reactor. To validate the feasibility of our novel combinatorial approach, a case study of zinc oxide (ZnO), a simple metal oxide whose properties are well-known, is performed. Because of the induced gradient, the ZnO (002) crystallite size was found to gradually vary across a 100 mm wafer (similar to 10-20 nm) with a corresponding increase in the normalized Raman E-2/A(1) peak intensity ratio. The findings agree well with the visible grain size observed from scanning electron microscope. The novel combinatorial approach provides a means of systematical interpretation of the combined effect of the two gradients, especially in the analysis of the microstructure of ZnO crystals. Moreover, the combinatorial library reveals that the process temperature, rather than the crystal size, plays the most significant role in determining the electrical conductivity of ZnO.
URI
https://pubs.acs.org/doi/10.1021/acscombsci.9b00007https://repository.hanyang.ac.kr/handle/20.500.11754/151932
ISSN
2156-8952; 2156-8944
DOI
10.1021/acscombsci.9b00007
Appears in Collections:
COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > CHEMISTRY(화학과) > Articles
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