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the design and characterization of a piezo-driven inchworm linear motor with a reduction-lever mechanism

Title
the design and characterization of a piezo-driven inchworm linear motor with a reduction-lever mechanism
Author
조남규
Keywords
Inchworm linear motor; Lever mechanism; Piezoelectric actuator; Precision positioning
Issue Date
2004-09
Publisher
JAPAN SOC MECHANICAL ENGINEERS
Citation
JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing, v. 47, No. 3, Page. 803-811
Abstract
A piezo-driven inchworm linear motor with a reduction lever mechanism has been designed and characterized. The inchworm motor consists of two clamping devices for gripping a moving shaft and one push-pull device operated by three piezoelectric stacks. To reduce positioning errors caused by control voltage fluctuations and to improve positioning accuracy, a reduction lever mechanism with a monolithic flexure structure is employed to the push-pull device. For the design analysis of the push-pull and clamping devices, their analytical models and equations were developed, by which the static characteristics were evaluated. The positioning performances of the inchworm motor assembled with the push-pull and clamping devices were experimentally characterized. The developed inchworm linear motor proved effective not only in performing a step movement of 1 nm up to 82.5 nm, with the step size optionally adjusted, but also in providing ultra high positioning accuracy.
URI
https://information.hanyang.ac.kr/#/eds/detail?an=edselc.2-52.0-8744282469&dbId=edselchttps://repository.hanyang.ac.kr/handle/20.500.11754/151887
ISSN
1344-7653
DOI
10.1299/jsmec.47.803
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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